PRESSURE SENSORS WITH THE REDUCED TEMPERATURE ERROR ON THE BASIS OF NANO- END
OF MICROELECTROMECHANICAL SYSTEMS AND FREQUENCY INTEGRATING DEVELOPING CONVERTERS 

Vasil'ev Valeriy Anatol'evich, doctor of technical sciences, professor, head of the department of instrument making, Penza State University, opto@bk.ru
Gromkov Nikolay Valentinovich, doctor of technical sciences, professor of sub-department of information and measuring equipment, Penza State University, ngrom@bk.ru
Nikolaev Dmitriy Pimenovich, candidate of technical sciences, associate professor, Higher school of economics, dnikolaev@hse.ru
Satybaldyev Oraz Satybaldyevich, doctor of physical and mathematical sciences, head of the department of mathematics, Kazakh national technical University named K. I. Satpayev, oraz_55_55@mail.ru

 621.7.08

Pressure sensors on the basis of thin-film tenzorezistorny nano – and microelectromechanical systems with the frequency output signal, steady to influence of temperatures are considered. Original schemes of frequency converters and topology of an arrangement of tenzoelement on a membrane of a sensitive element of the sensor are submitted.

pressure sensors, thin-film tenzorezistorny NIMEMS, temperature, frequency converters.